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华特气体合作研发高纯三氟化氯
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华特气体合作研发高纯三氟化氯
摘要:2021年3月25日,华特气体与红华实业签订高纯三氟化氯研发合作协议。2021年3月25日,广东华特气体股份有限公司(华特气体)与中国核工业集团有限公司(中核集团)全资孙公司四川红华实业有限公司(红华实业)正式签订了高纯三氟化氯生产技术合作开发协议。对于此次合作,华特气体表示,红华实业技术研发能力强、检测手段齐全,双方共同研发高纯三氟化氯相关核心技术,能够在这一领域打破国外垄断,快速实现进口替代。 据悉,高纯三氟化氯主要用于芯片制程中的蚀刻、硅片和腔体清洗,由于其高氟碳比和较强的氟离子自由...
China Fluoride Materials Monthly Report 202103(Chinese version)
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